Speciation of BC x N y films grown by PECVD with trimethylborazine precursor

标题
Speciation of BC x N y films grown by PECVD with trimethylborazine precursor
作者
关键词
-
出版物
ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 395, Issue 6, Pages 1901-1909
出版商
Springer Nature
发表日期
2009-08-27
DOI
10.1007/s00216-009-3056-6

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