Plasma-Enhanced ALD of Platinum with O2, N2and NH3Plasmas

In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition: Initial growth of HfO2 on Si and Ge substrates

(2011) K. Devloo-Casier et al.   APPLIED PHYSICS LETTERS

Atomic layer deposition synthesis of platinum–tungsten carbide core–shell catalysts for the hydrogen evolution reaction

(2011) Irene J. Hsu et al.   CHEMICAL COMMUNICATIONS

Tailoring nanoporous materials by atomic layer deposition

(2011) Christophe Detavernier et al.   CHEMICAL SOCIETY REVIEWS

In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO2 on Planar Substrates and in Nanoporous Films

(2011) Jolien Dendooven et al.   Journal of Physical Chemistry C

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Enhancing the Photon-Sensing Properties of ZnO Nanowires by Atomic Layer Deposition of Platinum

(2010) Yu-Hung Lin et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Platinum Nanoparticles Grown by Atomic Layer Deposition for Charge Storage Memory Applications

(2010) Steven Novak et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Catalysts with Pt Surface Coating by Atomic Layer Deposition for Solid Oxide Fuel Cells

(2010) Joon Hyung Shim et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Precise control of highly ordered arrays of nested semiconductor/metal nanotubes

(2010) Diefeng Gu et al.   Nano Research

Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy

(2009) W. M. M. Kessels et al.   APPLIED PHYSICS LETTERS

Nanoscale Structure and Morphology of Atomic Layer Deposition Platinum on SrTiO3(001)

(2009) Steven T. Christensen et al.   CHEMISTRY OF MATERIALS

Remote Plasma ALD of Platinum and Platinum Oxide Films

(2009) H. C. M. Knoops et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton-Exchange Membrane Fuel Cells

(2009) Chueh Liu et al.   Small

Atomic layer deposition of titanium nitride from TDMAT precursor

(2008) J. Musschoot et al.   MICROELECTRONIC ENGINEERING