A thermal-energy method for calculating thermoelastic damping in micromechanical resonators

标题
A thermal-energy method for calculating thermoelastic damping in micromechanical resonators
作者
关键词
-
出版物
JOURNAL OF SOUND AND VIBRATION
Volume 322, Issue 4-5, Pages 870-882
出版商
Elsevier BV
发表日期
2009-01-15
DOI
10.1016/j.jsv.2008.12.005

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