Geometric effects on thermoelastic damping in MEMS resonators

标题
Geometric effects on thermoelastic damping in MEMS resonators
作者
关键词
-
出版物
JOURNAL OF SOUND AND VIBRATION
Volume 309, Issue 3-5, Pages 588-599
出版商
Elsevier BV
发表日期
2007-09-11
DOI
10.1016/j.jsv.2007.07.055

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