Investigation on thermodynamics of ion-slicing of GaN and heterogeneously integrating high-quality GaN films on CMOS compatible Si(100) substrates
出版年份 2017 全文链接
标题
Investigation on thermodynamics of ion-slicing of GaN and heterogeneously integrating high-quality GaN films on CMOS compatible Si(100) substrates
作者
关键词
-
出版物
Scientific Reports
Volume 7, Issue 1, Pages -
出版商
Springer Nature
发表日期
2017-11-03
DOI
10.1038/s41598-017-15094-1
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注意:仅列出部分参考文献,下载原文获取全部文献信息。- Wafer-Scale Dies-Transfer Bonding Technology for Hybrid III/V-on-Silicon Photonic Integrated Circuit Application
- (2016) Xianshu Luo et al. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
- HVPE-GaN growth on GaN-based Advanced Substrates by Smart Cut™
- (2016) M. Iwinska et al. JOURNAL OF CRYSTAL GROWTH
- Room-temperature continuous-wave electrically injected InGaN-based laser directly grown on Si
- (2016) Yi Sun et al. Nature Photonics
- Phase-matched second harmonic generation with on-chip GaN-on-Si microdisks
- (2016) I. Roland et al. Scientific Reports
- Study of the effect of H implantation and annealing on LiTaO3 surface blistering
- (2015) Changdong Ma et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Sixteen years GaN on Si
- (2015) Armin Dadgar PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
- Investigation of blistering process in H-implanted semipolar GaN
- (2015) U. Dadwal et al. SCRIPTA MATERIALIA
- Study of surface blistering in GaN by hydrogen implantation at elevated temperatures
- (2015) B.S. Li et al. THIN SOLID FILMS
- Radio-frequency plasma-excited molecular beam epitaxy growth of GaN on graphene/Si(100) substrates
- (2014) Tsutomu Araki et al. Applied Physics Express
- Multiphonon resonant Raman scattering in non-polar GaN epilayers
- (2014) Mukesh Kumar et al. APPLIED PHYSICS LETTERS
- III-V/Si on silicon-on-insulator platform for hybrid nanoelectronics
- (2014) Slawomir Prucnal et al. JOURNAL OF APPLIED PHYSICS
- Layer-Transferred GaN Template by Ion Cut for Nitride-Based Light-Emitting Diodes
- (2013) Roy Byung-Kyu Chung et al. Applied Physics Express
- On the mechanism of blistering phenomenon in high temperature H-implanted GaN
- (2013) U. Dadwal et al. APPLIED PHYSICS LETTERS
- Surface- and point-defect-related Raman scattering in wurtzite semiconductors excited above the band gap
- (2013) C Kranert et al. NEW JOURNAL OF PHYSICS
- History of Gallium–Nitride-Based Light-Emitting Diodes for Illumination
- (2013) Shuji Nakamura et al. PROCEEDINGS OF THE IEEE
- Surface morphology and optical property of thermally annealed GaN substrates
- (2012) Dong Keun Oh et al. JOURNAL OF CRYSTAL GROWTH
- InP nanocrystals on silicon for optoelectronic applications
- (2012) Slawomir Prucnal et al. NANOTECHNOLOGY
- Temperature dependence of blistering in hydrogen implanted Si and Ge
- (2012) D.J. Pyke et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Heterogeneous Integration of Compound Semiconductors
- (2010) Oussama Moutanabbir et al. Annual Review of Materials Research
- Bulk GaN Ion Cleaving
- (2010) O. Moutanabbir et al. JOURNAL OF ELECTRONIC MATERIALS
- Thermodynamic model of helium and hydrogen co-implanted silicon surface layer splitting
- (2010) B.S. Li et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- SRIM – The stopping and range of ions in matter (2010)
- (2010) James F. Ziegler et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- Experimental elucidation of vacancy complexes associated with hydrogen ion-induced splitting of bulk GaN
- (2010) O. Moutanabbir et al. PHYSICAL REVIEW B
- Stress Adjustment and Bonding of H-Implanted 2 in. Freestanding GaN Wafer: The Concept of Double-Sided Splitting
- (2009) O. Moutanabbir et al. ELECTROCHEMICAL AND SOLID STATE LETTERS
- Seamless On-Wafer Integration of Si(100) MOSFETs and GaN HEMTs
- (2009) J.W. Chung et al. IEEE ELECTRON DEVICE LETTERS
- Mechanisms of ion-induced GaN thin layer splitting
- (2009) O. Moutanabbir et al. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
- X-ray diffraction of III-nitrides
- (2009) M A Moram et al. REPORTS ON PROGRESS IN PHYSICS
- GaN Photonic-Crystal Surface-Emitting Laser at Blue-Violet Wavelengths
- (2007) H. Matsubara et al. SCIENCE
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