标题
Optical properties and bandgap evolution of ALD HfSiOx films
作者
关键词
HfSiO<sub>x</sub>, VUV, Bandgap
出版物
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
出版商
Springer Nature
发表日期
2015-02-04
DOI
10.1186/s11671-014-0724-z
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- FT IR spectroscopy of silicon oxide and HfSiOx layer formation
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