Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

标题
Approaching intrinsic performance in ultra-thin silicon nitride drum resonators
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 6, Pages 064323
出版商
AIP Publishing
发表日期
2012-09-27
DOI
10.1063/1.4754576

向作者/读者发起求助以获取更多资源

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started