4.6 Article

Dissipation mechanisms in thermomechanically driven silicon nitride nanostrings

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APPLIED PHYSICS LETTERS
卷 100, 期 17, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4704914

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  1. University of Alberta, Faculty of Science
  2. CFI
  3. NSERC

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High-stress silicon nitride nanostrings are a promising system for sensing applications because of their ultra-high mechanical quality factors (Qs). By performing thermomechanical calibration across multiple vibrational modes, we are able to assess the roles of the various dissipation mechanisms in these devices. Specifically, we possess a set of nanostrings in which all measured modes fall upon a single curve of peak displacement versus frequency. This allows us to rule out bulk bending and intrinsic loss mechanisms as dominant sources of dissipation and to conclude that the most significant contribution to dissipation in high-stress nanostrings occurs at the anchor points. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4704914]

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