Influence of precursor gas ratio and firing on silicon surface passivation by APCVD aluminium oxide

Surface passivation of c-Si by atmospheric pressure chemical vapor deposition of Al2O3

(2012) Lachlan E. Black et al.   APPLIED PHYSICS LETTERS

High-temperature stability of c-Si surface passivation by thick PECVD Al2O3 with and without hydrogenated capping layers

(2012) Pierre Saint-Cast et al.   APPLIED SURFACE SCIENCE

Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells

(2012) G. Dingemans et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Chemical and structural study of electrically passivating Al2O3/Si interfaces prepared by atomic layer deposition

(2012) Volker Naumann et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Blistering in ALD Al2O3 passivation layers as rear contacting for local Al BSF Si solar cells

(2012) B. Vermang et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Overview of optical properties of Al2O3 films prepared by various techniques

(2012) J. Houska et al.   THIN SOLID FILMS

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks

(2010) G. Dingemans et al.   APPLIED PHYSICS LETTERS

Influence of the Deposition Temperature on the c-Si Surface Passivation by Al[sub 2]O[sub 3] Films Synthesized by ALD and PECVD

(2010) G. Dingemans et al.   ELECTROCHEMICAL AND SOLID STATE LETTERS

Role of hydrogen in the surface passivation of crystalline silicon by sputtered aluminum oxide

(2010) Tsu-Tsung Andrew Li et al.   PROGRESS IN PHOTOVOLTAICS

High Quality Aluminum Oxide Passivation Layer for Crystalline Silicon Solar Cells Deposited by Parallel-Plate Plasma-Enhanced Chemical Vapor Deposition

(2009) Shinsuke Miyajima et al.   Applied Physics Express

Very low surface recombination velocity on p-type c-Si by high-rate plasma-deposited aluminum oxide

(2009) Pierre Saint-Cast et al.   APPLIED PHYSICS LETTERS

Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition

(2009) G. Dingemans et al.   Physica Status Solidi-Rapid Research Letters

Composition–constitution–morphology relationship of Al2O3 thin films deposited by plasma assisted chemical vapor deposition

(2009) Rony Snyders et al.   SURFACE & COATINGS TECHNOLOGY

High efficiency n-type Si solar cells on Al2O3-passivated boron emitters

(2008) Jan Benick et al.   APPLIED PHYSICS LETTERS

On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3

(2008) B. Hoex et al.   JOURNAL OF APPLIED PHYSICS