Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition

标题
Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume 4, Issue 1-2, Pages 10-12
出版商
Wiley
发表日期
2009-11-02
DOI
10.1002/pssr.200903334

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