On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3

标题
On the c-Si surface passivation mechanism by the negative-charge-dielectric Al2O3
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 11, Pages 113703
出版商
AIP Publishing
发表日期
2008-12-02
DOI
10.1063/1.3021091

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