Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film

标题
Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
作者
关键词
-
出版物
Physica Status Solidi-Rapid Research Letters
Volume 5, Issue 1, Pages 22-24
出版商
Wiley
发表日期
2010-11-17
DOI
10.1002/pssr.201004378

向作者/读者发起求助以获取更多资源

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search