Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure

Atomic Layer Deposition of Al2O3 and ZnO at Atmospheric Pressure in a Flow Tube Reactor

(2011) Jesse. S. Jur et al.   ACS Applied Materials & Interfaces

An atomic layer deposition process for moving flexible substrates

(2011) P.S. Maydannik et al.   CHEMICAL ENGINEERING JOURNAL

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

(2011) Paul Poodt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Progress and future directions for atomic layer deposition and ALD-based chemistry

(2011) Gregory N. Parsons et al.   MRS BULLETIN

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

(2010) Paul Poodt et al.   ADVANCED MATERIALS

Temperature-Dependent Subsurface Growth during Atomic Layer Deposition on Polypropylene and Cellulose Fibers

(2010) Jesse S. Jur et al.   LANGMUIR

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

“Zincone” Zinc Oxide−Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition

(2009) Qing Peng et al.   CHEMISTRY OF MATERIALS

Atomic Layer Deposition and Abrupt Wetting Transitions on Nonwoven Polypropylene and Woven Cotton Fabrics

(2009) G. Kevin Hyde et al.   LANGMUIR

Reproducible growth of p-type ZnO:N using a modified atomic layer deposition process combined with dark annealing

(2008) L. Dunlop et al.   APPLIED PHYSICS LETTERS

Stable ZnO thin film transistors by fast open air atomic layer deposition

(2008) David H. Levy et al.   APPLIED PHYSICS LETTERS