Mechanically robust silica-like coatings deposited by microwave plasmas for barrier applications

Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications

(2012) Anna Maria Coclite et al.   JOURNAL OF APPLIED PHYSICS

Initiated PECVD of Organosilicon Coatings: A New Strategy to Enhance Monomer Structure Retention

(2012) Anna Maria Coclite et al.   Plasma Processes and Polymers

Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

(2011) Shih-Hui Jen et al.   JOURNAL OF APPLIED PHYSICS

Toughness evaluation of hard coatings and thin films

(2011) Sam Zhang et al.   THIN SOLID FILMS

Single-Chamber Deposition of Multilayer Barriers by Plasma Enhanced and Initiated Chemical Vapor Deposition of Organosilicones

(2010) Anna Maria Coclite et al.   Plasma Processes and Polymers

Digital Control of SiO2 Film Deposition at Room Temperature

(2009) Pieter C. Rowlette et al.   Journal of Physical Chemistry C

Flexible Cross-Linked Organosilicon Thin Films by Initiated Chemical Vapor Deposition

(2009) Anna Maria Coclite et al.   MACROMOLECULES

Permeation mechanisms of pulsed microwave plasma deposited silicon oxide films for food packaging applications

(2008) Michael Deilmann et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Nanoindentation Investigation of HfO[sub 2] and Al[sub 2]O[sub 3] Films Grown by Atomic Layer Deposition

(2008) K. Tapily et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Mechanical properties of sputtered silicon oxynitride films by nanoindentation

(2008) Yan Liu et al.   MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING

Pulsed Plasma Deposition from Vinyltrimethylsilane/Oxygen Mixtures

(2008) Adriano Francescangeli et al.   Plasma Processes and Polymers

Pulsed microwave plasma polymerization of silicon oxide films: Application of efficient permeation barriers on polyethylene terephthalate

(2007) Michael Deilmann et al.   SURFACE & COATINGS TECHNOLOGY