Area Selective Atomic Layer Deposition by Microcontact Printing with a Water-Soluble Polymer

Area-Selective ALD with Soft Lithographic Methods: Using Self-Assembled Monolayers to Direct Film Deposition

(2009) Xirong Jiang et al.   Journal of Physical Chemistry C

Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer

(2009) Elina Färm et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a Reactant

(2009) Han-Bo-Ram Lee et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Application of Atomic Layer Deposition of Platinum to Solid Oxide Fuel Cells

(2008) Xirong Jiang et al.   CHEMISTRY OF MATERIALS

Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers

(2008) Elina Färm et al.   Journal of Physical Chemistry C

Blocking the Lateral Film Growth at the Nanoscale in Area-Selective Atomic Layer Deposition

(2008) Robin H. A. Ras et al.   JOURNAL OF THE AMERICAN CHEMICAL SOCIETY

Nanopatterning materials using area selective atomic layer deposition in conjunction with thermochemical surface modification via heated AFM cantilever probe lithography

(2008) Yueming Hua et al.   MICROELECTRONIC ENGINEERING

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

(2008) Hyungjun Kim et al.   THIN SOLID FILMS