Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers

标题
Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 112, Issue 40, Pages 15791-15795
出版商
American Chemical Society (ACS)
发表日期
2008-09-04
DOI
10.1021/jp803872s

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