Nanopatterning materials using area selective atomic layer deposition in conjunction with thermochemical surface modification via heated AFM cantilever probe lithography

标题
Nanopatterning materials using area selective atomic layer deposition in conjunction with thermochemical surface modification via heated AFM cantilever probe lithography
作者
关键词
-
出版物
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 934-936
出版商
Elsevier BV
发表日期
2008-02-23
DOI
10.1016/j.mee.2008.01.105

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