Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures

标题
Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures
作者
关键词
Oxygen Vacancy, Substrate Temperature, Light Emit Diode, Texture Coefficient, Intrinsic Stress
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 25, Issue 12, Pages 5416-5421
出版商
Springer Nature
发表日期
2014-09-24
DOI
10.1007/s10854-014-2322-3

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