Influence of growth temperature on the electrical and structural characteristics of conductive Al-doped ZnO thin films grown by atomic layer deposition

标题
Influence of growth temperature on the electrical and structural characteristics of conductive Al-doped ZnO thin films grown by atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 545, Issue -, Pages 106-110
出版商
Elsevier BV
发表日期
2013-07-25
DOI
10.1016/j.tsf.2013.07.045

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