Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique

标题
Electrical and optical properties of zinc oxide layers grown by the low-temperature atomic layer deposition technique
作者
关键词
-
出版物
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 247, Issue 7, Pages 1653-1657
出版商
Wiley
发表日期
2010-05-04
DOI
10.1002/pssb.200983678

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