Channel cracks in atomic-layer and molecular-layer deposited multilayer thin film coatings

标题
Channel cracks in atomic-layer and molecular-layer deposited multilayer thin film coatings
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 23, Pages 233514
出版商
AIP Publishing
发表日期
2014-06-23
DOI
10.1063/1.4884438

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