标题
Stress-induced leakage current and trap generation in HfO2 thin films
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 7, Pages 074103
出版商
AIP Publishing
发表日期
2012-10-03
DOI
10.1063/1.4756993
参考文献
相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。- Gate-last TiN/HfO2 band edge effective work functions using low-temperature anneals and selective cladding to control interface composition
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