期刊
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
卷 266, 期 12-13, 页码 2962-2965出版社
ELSEVIER
DOI: 10.1016/j.nimb.2008.03.148
关键词
ZnO; N-implantation; p-type; second phase; luminescence
P-type ZnO film was obtained by N-implantation at energy of 120 keV with annealing at 850 degrees C in oxygen. Room temperature Hall effect measurements revealed that the carrier concentration and mobility was 9.95 x 10(18) cm(-3) and 14.3 cm(2)/vs, respectively, in the implanted ZnO with optimal fluence of 10(15) N/cm(2), where more N acceptors were activated as confirmed by X-ray diffraction and photoluminescence. The increase of lattice constants and appearance of emission peaks at 3.26 and 3.18 eV after implantation indicated that the p-type ZnO was realized by substitution of N atom for O sublattice. (C) 2008 Elsevier B.V. All rights reserved.
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