Thermal chemistry of the Cu-KI5 atomic layer deposition precursor on a copper surface

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Title
Thermal chemistry of the Cu-KI5 atomic layer deposition precursor on a copper surface
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 1, Pages 01A108
Publisher
American Vacuum Society
Online
2014-10-02
DOI
10.1116/1.4896940

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