Effect of transition metal salts on the initiated chemical vapor deposition of polymer thin films

Published 2015 View Full Article

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Title
Effect of transition metal salts on the initiated chemical vapor deposition of polymer thin films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 3, Pages 031504
Publisher
American Vacuum Society
Online
2015-03-21
DOI
10.1116/1.4915247

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