Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

Title
Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 1, Pages 01A101
Publisher
American Vacuum Society
Online
2014-07-24
DOI
10.1116/1.4890006

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