High aspect ratio iridescent three-dimensional metal–insulator–metal capacitors using atomic layer deposition

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Title
High aspect ratio iridescent three-dimensional metal–insulator–metal capacitors using atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 33, Issue 1, Pages 01A103
Publisher
American Vacuum Society
Online
2014-07-29
DOI
10.1116/1.4891319

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