Journal
FREQUENZ
Volume 62, Issue 3-4, Pages 96-99Publisher
FACHVERLAG SCHIELE SCHON
DOI: 10.1515/FREQ.2008.62.3-4.96
Keywords
ICP-CVD; MOEMS; DBR; SiOx; SiNx; tunable optical filter; VCSEL
Categories
Ask authors/readers for more resources
We present the realization and investigation of tunable dielectric distributed bragg reflectors consisting of silicon oxide and silicon nitride deposited by an inductively coupled plasma chemical vapor deposition. These dielectric mirrors are used for tunable optical Fabry-Perot filters and for tunable vertical cavity surface emitting laser operating at wavelengths around 1.5 mu m.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available