Barium Strontium Zirconate Titanate (Ba,Sr)(Zr,Ti)O-3 Thin Films for Tunable Microwave Applications

(Ba0.55Sr0.45)(Zr0.1Ti0.9)O-3 (BSZT) thin films were deposited by pulsed laser deposition on LSAT(001) substrates. X-ray diffraction characterization reveals a good quality of crystallization and epitaxial nature of the films. The in-plane dielectric properties of the films were characterized over a wide frequency range from 50 MHz to 20 GHz by using ring resonator-structured samples. Based on the S-parameter measurements and electromagnetic simulation it was found that microwave dielectric constant of the BSZT thin film is similar to 350. Large dielectric tunability was also observed in this material.