Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing

Title
Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing
Authors
Keywords
-
Journal
EXPERT SYSTEMS WITH APPLICATIONS
Volume 39, Issue 4, Pages 4075-4083
Publisher
Elsevier BV
Online
2011-09-30
DOI
10.1016/j.eswa.2011.09.088

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