Vertical and Smooth Single-Step Reactive Ion Etching Process for InP Membrane Waveguides

Title
Vertical and Smooth Single-Step Reactive Ion Etching Process for InP Membrane Waveguides
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 162, Issue 8, Pages E90-E95
Publisher
The Electrochemical Society
Online
2015-05-10
DOI
10.1149/2.0371508jes

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