Fabrication of High-Performance Ultrathin In2O3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography

Title
Fabrication of High-Performance Ultrathin In2O3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography
Authors
Keywords
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Journal
ACS Nano
Volume 9, Issue 4, Pages 4572-4582
Publisher
American Chemical Society (ACS)
Online
2015-03-24
DOI
10.1021/acsnano.5b01211

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