Journal
EUROPEAN POLYMER JOURNAL
Volume 49, Issue 6, Pages 1642-1653Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.eurpolymj.2013.02.017
Keywords
Benzocyclobutene; Thermosets; Curing kinetics; Mechanical properties; Thermal properties; Photosensitivity
Categories
Funding
- National Science and Technology Major Project [2009ZX02038, 2011ZX02602]
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Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220-270 degrees C. The curing kinetic parameters, the apparent activation energy (E-a), the frequency factor (A) and the reaction order (n), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability (T-d5 > 435 degrees C), high glass transition temperature (T-g > 300 degrees C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography. (C) 2013 Elsevier Ltd. All rights reserved.
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