A fabrication technology for epitaxial Ni-Mn-Ga microactuators

Title
A fabrication technology for epitaxial Ni-Mn-Ga microactuators
Authors
Keywords
-
Journal
European Physical Journal-Special Topics
Volume 158, Issue 1, Pages 167-172
Publisher
Springer Nature
Online
2008-04-30
DOI
10.1140/epjst/e2008-00671-5

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