Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry

Published 2008 View Full Article

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Title
Critical dimension of biperiodic gratings determined by spectral ellipsometry and Mueller matrix polarimetry
Authors
Keywords
-
Journal
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
Volume 42, Issue 3, Pages 351-359
Publisher
EDP Sciences
Online
2008-07-03
DOI
10.1051/epjap:2008089

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