Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
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Title
Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
Authors
Keywords
-
Journal
EUROPEAN PHYSICAL JOURNAL D
Volume 68, Issue 3, Pages -
Publisher
Springer Nature
Online
2014-03-22
DOI
10.1140/epjd/e2014-40430-3
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