Development and Field-Scale Optimization of a Honeycomb Zeolite Rotor Concentrator/Recuperative Oxidizer for the Abatement of Volatile Organic Carbons from Semiconductor Industry

Title
Development and Field-Scale Optimization of a Honeycomb Zeolite Rotor Concentrator/Recuperative Oxidizer for the Abatement of Volatile Organic Carbons from Semiconductor Industry
Authors
Keywords
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Journal
ENVIRONMENTAL SCIENCE & TECHNOLOGY
Volume 46, Issue 1, Pages 441-446
Publisher
American Chemical Society (ACS)
Online
2011-11-18
DOI
10.1021/es203174y

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