Titanium nitride films for micro-supercapacitors: Effect of surface chemistry and film morphology on the capacitance

Title
Titanium nitride films for micro-supercapacitors: Effect of surface chemistry and film morphology on the capacitance
Authors
Keywords
TiN films, Electrochemical capacitors, DC-sputtering, Porous films
Journal
JOURNAL OF POWER SOURCES
Volume 300, Issue -, Pages 525-532
Publisher
Elsevier BV
Online
2015-11-20
DOI
10.1016/j.jpowsour.2015.09.012

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