Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography

Published 2013 View Full Article

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Title
Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography
Authors
Keywords
-
Journal
ELECTRONICS LETTERS
Volume 49, Issue 6, Pages 410-412
Publisher
Institution of Engineering and Technology (IET)
Online
2013-03-21
DOI
10.1049/el.2013.0206

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