High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas

Published 2010 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas
Authors
Keywords
-
Journal
Electronic Materials Letters
Volume 5, Issue 4, Pages 205-208
Publisher
Springer Nature
Online
2010-02-01
DOI
10.3365/eml.2009.12.205

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.