High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas

Title
High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas
Authors
Keywords
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Journal
Electronic Materials Letters
Volume 5, Issue 4, Pages 205-208
Publisher
Springer Nature
Online
2010-02-01
DOI
10.3365/eml.2009.12.205

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