Scalable control of graphene growth on 4H-SiC C-face using decomposing silicon nitride masks

Published 2015 View Full Article

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Title
Scalable control of graphene growth on 4H-SiC C-face using decomposing silicon nitride masks
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 48, Issue 15, Pages 152001
Publisher
IOP Publishing
Online
2015-03-25
DOI
10.1088/0022-3727/48/15/152001

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