Electrodeposition of copper into trenches from a citrate plating bath

Title
Electrodeposition of copper into trenches from a citrate plating bath
Authors
Keywords
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Journal
ELECTROCHIMICA ACTA
Volume 56, Issue 25, Pages 9391-9396
Publisher
Elsevier BV
Online
2011-08-18
DOI
10.1016/j.electacta.2011.08.023

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