Modified NiSi∕Si Schottky Barrier Height by Nitrogen Implantation

Title
Modified NiSi∕Si Schottky Barrier Height by Nitrogen Implantation
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 12, Issue 1, Pages H1
Publisher
The Electrochemical Society
Online
2008-11-13
DOI
10.1149/1.3002394

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