Enhanced Dielectric Properties of SrTiO[sub 3] Films with a SrRuO[sub 3] Seed by Plasma-Enhanced Atomic Layer Deposition

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Title
Enhanced Dielectric Properties of SrTiO[sub 3] Films with a SrRuO[sub 3] Seed by Plasma-Enhanced Atomic Layer Deposition
Authors
Keywords
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Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 12, Issue 2, Pages G5
Publisher
The Electrochemical Society
Online
2008-12-13
DOI
10.1149/1.3028218

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