Application of Deuterium Exchange to Analyze Moisture Uptake Characteristics of Porous Low-Dielectric-Constant SiOCH Films

Published 2008 View Full Article

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Title
Application of Deuterium Exchange to Analyze Moisture Uptake Characteristics of Porous Low-Dielectric-Constant SiOCH Films
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 9, Pages H255
Publisher
The Electrochemical Society
Online
2008-07-23
DOI
10.1149/1.2947786

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