Accurate SIMS Doping Profiling of Aluminum-Doped Solid-Phase Epitaxy Silicon Islands

Published 2008 View Full Article

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Title
Accurate SIMS Doping Profiling of Aluminum-Doped Solid-Phase Epitaxy Silicon Islands
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 11, Issue 4, Pages H74
Publisher
The Electrochemical Society
Online
2008-02-17
DOI
10.1149/1.2836739

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