Development of a 3-dimensional LIGA process and application to fabricate a spiral microcoil

Published 2008 View Full Article

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Title
Development of a 3-dimensional LIGA process and application to fabricate a spiral microcoil
Authors
Keywords
-
Journal
ELECTRICAL ENGINEERING IN JAPAN
Volume 166, Issue 1, Pages 43-51
Publisher
Wiley
Online
2008-09-24
DOI
10.1002/eej.20679

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