4.0 Article

Effect of Microbubbles on Ozonized Water for Photoresist Removal

Journal

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 28, Issue 2, Pages 293-298

Publisher

TECHNICAL ASSOC PHOTOPOLYMERS,JAPAN
DOI: 10.2494/photopolymer.28.293

Keywords

Ozone microbubbles; Photoresist removal; Hydroxyl radicals

Funding

  1. Japan Science and Technology Agency (JST)
  2. Ministry of Economy, Trade and Industry (METI)

Ask authors/readers for more resources

The existence of microbubbles in ozonized water has been shown to significantly enhance the photoresist removal rate due to an elevated dissolved ozone concentration and a direct effect of the microbubbles relating to the radical generation. Additionally, the ozone microbubble solution was able to effectively remove a high-dose ion-implanted photoresist, which is extremely resistant to removal by ozonized water and other wet chemicals because of its amorphous carbon-like layer, or crust. Electron spin resonance experiments were also performed without the influence of serious metal contamination and indicated the presence of hydroxyl radicals, which are thought to be formed by interaction of ozone with hydroxide ions adsorbed at the gas-water interface upon collapse of the microbubbles.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.0
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Chemistry, Physical

Catalytic Hydrogenation of Nitrate in Water Using a Pd-Cu/Al2O3 Catalyst and Dilute H2 Microbubbles

Norio Nakayama, Masayoshi Takahashi

CATALYSIS LETTERS (2015)

Article Environmental Sciences

Irrigation with oxygen-nanobubble water can reduce methane emission and arsenic dissolution in a flooded rice paddy

Kazunori Minamikawa, Masayoshi Takahashi, Tomoyuki Makino, Kanako Tago, Masahito Hayatsu

ENVIRONMENTAL RESEARCH LETTERS (2015)

Article Polymer Science

Degradation of Polymers for Resist Using Microbubbles on Ozonized Water

Kohei Matsuura, Takashi Nishiyama, Eriko Sato, Masashi Yamamoto, Masayoshi Takahashi, Kunihiko Koike, Hideo Horibe

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2015)

Article Polymer Science

Effect of Temperature on Degradation of Polymers for Photoresist Using Ozone Microbubbles

Kohei Matsuura, Takashi Nishiyama, Eriko Sato, Masashi Yamamoto, Tomosumi Kamimura, Masayoshi Takahashi, Kunihiko Koike, Hideo Horibe

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2016)

Article Polymer Science

Effects of Oxygen Microbubbles on Photoresist Layers under Hot Water Conditions

Masayoshi Takahashi, Yasuyuki Shirai, Akinobu Teramoto, Tunejirou Takahashi, Katsumi Tatera, Kouhei Matsuura, Hideo Horibe

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2016)

Article Environmental Sciences

Degradation of phenol by the collapse of microbubbles

Pan Li, Masayoshi Takahashi, Kaneo Chiba

CHEMOSPHERE (2009)

Article Environmental Sciences

Enhanced free-radical generation by shrinking microbubbles using a copper catalyst

Pan Li, Masayoshi Takahashi, Kaneo Chiba

CHEMOSPHERE (2009)

Article Chemistry, Physical

Effect of Microbubbles on Ozonized Water for Photoresist Removal

Masayoshi Takahashi, Hiroaki Ishikawa, Toshiyuki Asano, Hideo Horibe

JOURNAL OF PHYSICAL CHEMISTRY C (2012)

Article Materials Science, Multidisciplinary

Effects of ozone nano-bubble water on periodontopathic bacteria and oral cells - in vitro studies

Sae Hayakumo, Shinichi Arakawa, Masayoshi Takahashi, Keiko Kondo, Yoshihiro Mano, Yuichi Izumi

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS (2014)

Article Nanoscience & Nanotechnology

Effects of temperatures and carbon dioxide nanobubbles on superior electric storage for anodically oxidized films of AlY10 amorphous alloy

Mikio Fukuhara, Tomoyuki Kuroda, Fumihiko Hasegawa, Masayoshi Takahashi, Tomoyuki Suwa, Toshiyuki Hashida, Kazuhisa Sato, Masahiko Nishijima, K. Konno

AIP ADVANCES (2019)

Article Chemistry, Multidisciplinary

Free-Radical Generation from Bulk Nanobubbles in Aqueous Electrolyte Solutions: ESR Spin-Trap Observation of Microbubble-Treated Water

Masayoshi Takahashi, Yasuyuki Shirai, Shigetoshi Sugawa

Summary: Microbubbles collapse underwater, generating free radicals such as hydroxyl radicals, especially under strongly acidic conditions. The environmental changes caused by the collapse of microbubbles may trigger radical generation by dispersing accumulated chemical potential. Experiments also show that ESR signals can still be detected in water treated with microbubbles even months after their dispersion, indicating the potential role of iron ions in stabilizing and converting microbubbles.

LANGMUIR (2021)

Article Chemistry, Multidisciplinary

Mineralization of Poly(vinyl alcohol) by Ozone Microbubbles under a Wide Range of pH Conditions

Masayoshi Takahashi, Ryo Nakatsuka, Shuzo Kutsuna, Yasuyuki Shirai, Shigetoshi Sugawa

Summary: This study evaluated the effectiveness of ozone microbubble treatment for mineralizing poly(vinyl alcohol) (PVA) in solution. The results showed that ozone microbubbles could effectively mineralize PVA, while traditional ozone bubbling methods were not as efficient.

LANGMUIR (2023)

Article Chemistry, Physical

Microstructural Study on Dissolution of Natural Methane Hydrate by Multicontrast and Multiscale X-ray Computed Tomography

Satoshi Takeya, Akihiro Hachikubo, Hirotoshi Sakagami, Hirotsugu Minami, Satoshi Yamashita, Masayoshi Takahashi, Keiichi Hirano, Kazuyuki Hyodo, Akio Yoneyama

Summary: Understanding the dissolution processes of natural methane (CH4) hydrates is crucial for assessing the amount of methane released into seawater from unconventional natural gas resources. High-resolution experiments have successfully visualized the spatial relationships between methane hydrates and seawater, revealing that dissociation of methane hydrates leads to the formation of microbubbles.

JOURNAL OF PHYSICAL CHEMISTRY C (2023)

Article Chemistry, Physical

Formation of hydroxyl radicals by collapsing ozone microbubbles under strongly acidic conditions

Masayoshi Takahashi, Kaneo Chiba, Pan Li

JOURNAL OF PHYSICAL CHEMISTRY B (2007)

No Data Available