Local structural analysis of a-SiCx:H films formed by decomposition of tetramethylsilane in microwave discharge flow of Ar

Title
Local structural analysis of a-SiCx:H films formed by decomposition of tetramethylsilane in microwave discharge flow of Ar
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 20, Issue 3, Pages 364-367
Publisher
Elsevier BV
Online
2011-01-19
DOI
10.1016/j.diamond.2011.01.020

Ask authors/readers for more resources

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More