Reactive sputter-deposition of oxygenated amorphous carbon thin films in Ar/O2

Published 2011 View Full Article

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Title
Reactive sputter-deposition of oxygenated amorphous carbon thin films in Ar/O2
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 20, Issue 4, Pages 509-515
Publisher
Elsevier BV
Online
2011-02-13
DOI
10.1016/j.diamond.2011.02.002

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